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高真空閥

常時閉型高真空電磁閥 XSA

    ・最低使用壓力: 1 × 10-6 Pa (abs)
    ・洩漏量: 內部1.3 × 10-9 Pa·m3/s、外部 1.3 × 10-11 Pa·m3/s
    ・備有2種類的接頭、母螺牙
    ・消耗電力:最大削減25%
    ・質量:最大削減18% (0.5 kg → 0.41 kg)
系列閥形式使用流體配管連接方式配管尺寸
XSA常時閉空氣
惰性氣體
面密封接頭
卡套接頭
1/4, 3/8
XSA常時閉空氣
惰性氣體
母螺牙
(Rc, NPT)
1/8, 1/4, 3/8

產品特點

■Minimum operating pressure:1×10-6Pa(abs)
■Leakage:Internal 1.3×10-9Pa・m3/s, External 1.3×10-11Pa・m3/s
■2 types of fitting and female threads available

Face seal fitting

A fitting with high leak integrity from vacuum to positive pressure, that forms a seal through the placement of a metal gasket at the end of the sleeve and the tightening of the nut.

Compression fitting

A self-aligning tube fitting that uses ferrule rings to compress the tubing, affecting the seal when the nut is tightened.

Female thread(Rc, NPT) [New]






■Power consumption
■Weight
■Fluid temperature:5 to 60℃
■Reverse pressure potential:0.5 MPa(G)

※ XSA1-12

■Rated voltage
■Applications
■Variations

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