高真空閥
常時閉型高真空電磁閥 XSA
系列 | 閥形式 | 使用流體 | 配管連接方式 | 配管尺寸 |
---|---|---|---|---|
XSA | 常時閉 | 空氣 惰性氣體 | 面密封接頭 卡套接頭 | 1/4, 3/8 |
XSA | 常時閉 | 空氣 惰性氣體 | 母螺牙 (Rc, NPT) | 1/8, 1/4, 3/8 |
產品特點
■Minimum operating pressure:1×10-6Pa(abs)
■Leakage:Internal 1.3×10-9Pa・m3/s, External 1.3×10-11Pa・m3/s
■2 types of fitting and female threads available
Face seal fitting
A fitting with high leak integrity from vacuum to positive pressure, that forms a seal through the placement of a metal gasket at the end of the sleeve and the tightening of the nut.
Compression fitting
A self-aligning tube fitting that uses ferrule
rings to compress the tubing, affecting the
seal when the nut is tightened.
Female thread(Rc, NPT) [New]
■Fluid temperature:5 to 60℃
■Reverse pressure potential:0.5 MPa(G)※
※ XSA1-12