閘閥
300mm晶圓對應平行密封型閘閥 XGTP
| 系列 | 使用環境 壓力 (Pa)(abs) | 使用流體 | 開口窗尺寸 (高x寬) (mm) | 作動 壓力 (MPa)(G) |
|---|---|---|---|---|
| XGTP | 大氣壓 ～ 10-6 | 惰性氣體 | 50 x 336 | 0.45 ～ 0.6 |
產品特點
■Long service life 3 million cycles (at ordinary temperature)
Low particle generation Reduced by 1/5 or more
Low particle generation Reduced by 1/5 or more
■Low particle generation and longer service life through the use of
a parallel sealing motion
a parallel sealing motion
The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.
■Easier maintenance
Easy replacement of bellows
Gate can be replaced from above.(Made to order)
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