高真空閥
鋁製高真空L型閥 XL□
![](https://www.smcworld.com/upfiles/etc/series/zh-tw/img1-028-XL.jpg)
系列 | 操作方式 | 閥形式 | 軸密封 方式 | 用途 | 法蘭 尺寸 |
---|---|---|---|---|---|
XLA | 氣控型 | 伸縮囊密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ~ 160 |
XLAV (附電磁閥) | 氣控型 | 伸縮囊密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ~ 160 |
XLC | 氣控型 | 伸縮囊密封 | 複動 | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ~ 160 |
XLCV (附電磁閥) | 氣控型 | 伸縮囊密封 | 複動 | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ~ 80 |
XLF | 氣控型 | O形環密封 | 單動 (N.C.) | Body : Aluminum alloy | 16 ~ 160 |
XLFV (附電磁閥) | 氣控型 | O形環密封 | 單動 (N.C.) | Body : Aluminum alloy | 16 ~ 160 |
XLG | 氣控型 | O形環密封 | 複動 | Body : Aluminum alloy | 16 ~ 80 |
XLGV (附電磁閥) | 氣控型 | O形環密封 | 複動 | Body : Aluminum alloy | 16 ~ 80 |
XLD | 氣控型 | 伸縮囊密封 O形環密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 25 ~ 160 |
XLDV (附電磁閥) | 氣控型 | 伸縮囊密封 O形環密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 25 ~ 160 |
XLH | Manual | 伸縮囊密封 | Manual | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ~ 50 |
XLS | Electromagnetic | Pressure balanced bellow seal | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16, 25 |
產品特點
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
![](/newproducts/en/xla/images/02.jpg)
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
![](/newproducts/en/xla/images/03.jpg)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.