高真空閥
鋁製高真空L型閥 XLA/C/F/G
系列 | 操作方式 | 閥 形式 | 軸密封 方式 | 用途 | 法蘭 尺寸 |
---|---|---|---|---|---|
XLA-2 | 氣控型 | 單動 (N.C.) | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ~ 80 |
XLAV-2 (附電磁閥) | 氣控型 | 單動 (N.C.) | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ~ 80 |
XLC-2 | 氣控型 | 複動 | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ~ 80 |
XLF-2 | 氣控型 | 單動 (N.C.) | O形環密封 | 高速作動, 高作動次數 | 16 ~ 80 |
XLFV-2 (附電磁閥) | 氣控型 | 單動 (N.C.) | O形環密封 | 高速作動, 高作動次數 | 16 ~ 80 |
XLG -2 | 氣控型 | 複動 | O形環密封 | 高速作動, 高作動次數 | 16 ~ 80 |
產品特點
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
![](/assets/newproducts/en-jp/xla/images/02.jpg)
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
![](/assets/newproducts/en-jp/xla/images/03.jpg)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.