高真空閥
鋁製高真空L型閥 XLA/C/F/G
| 系列 | 操作方式 | 閥 形式 | 軸密封 方式 | 用途 | 法蘭 尺寸 |
|---|---|---|---|---|---|
| XLA-2 | 氣控型 | 單動 (N.C.) | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ～ 80 |
| XLAV-2 (附電磁閥) | 氣控型 | 單動 (N.C.) | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ～ 80 |
| XLC-2 | 氣控型 | 複動 | 伸縮囊密封 | 無粉塵, 無塵化 | 16 ～ 80 |
| XLF-2 | 氣控型 | 單動 (N.C.) | O形環密封 | 高速作動, 高作動次數 | 16 ～ 80 |
| XLFV-2 (附電磁閥) | 氣控型 | 單動 (N.C.) | O形環密封 | 高速作動, 高作動次數 | 16 ～ 80 |
| XLG -2 | 氣控型 | 複動 | O形環密封 | 高速作動, 高作動次數 | 16 ～ 80 |
產品特點
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator
For 100/120° C
