鋁製高真空L型閥 XLA/C-100・160（-1）-X152

系列	操作方式	閥形式	軸密封方式	用途	法蘭尺寸
XLA-100・160-X152	氣控型	單動 (N.C.)	伸縮囊密封	無粉塵, 無塵化	100，160
XLC-100・160-1-X152	氣控型	複動	伸縮囊密封	無粉塵, 無塵化	100，160

■Improved durability of bellows (Flange sizes 100 and 160)

■Service life of two million cycles^∗1

　∗1 The service life is based on SMC's testing. Refer to the operation manual for details.

■Space required for equipment can be reduced

■Lightweight, Compact

Large conductance, small body, excellent
resistance against fluorine corrosion (body)

■Variations