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高真空阀

铝制高真空L型阀 XLA/C/F/G

    ・采用铝制主体
     均一的烤焙温度
     轻量·紧凑
     气体溢出少
     重金属污染少
    ・可更换波纹管
系列操作方式阀形式轴密封
方式
用途法兰
尺寸
XLA-2气控式单作用
(N.C.)
波纹管密封无尘
清洁化
16~80
XLAV-2(带电磁阀)气控式单作用
(N.C.)
波纹管密封无尘
清洁化
16~80
XLC-2气控式双作用波纹管密封无尘
清洁化
16~80
XLF-2气控式单作用
(N.C.)
O形圈密封高速动作
高动作次数
16~80
XLFV-2(带电磁阀)气控式单作用
(N.C.)
O形圈密封高速动作
高动作次数
16~80
XLG-2气控式双作用O形圈密封高速动作
高动作次数
16~80

产品特点

■Aluminum High Vacuum Angle Valve
■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

■Possible to replace the bellows
(Bellows seal type)

Bellows assembly can be replaced which reduces maintenance costs and waste materials.

■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

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