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高真空阀

铝制高真空L型阀 XL□

    ・耐氟性强
    ・气体溢出少
    ・重金属污染小

    ※法兰尺寸16〜80的XLA/C/F/G已进行了产品变更。
      请选择XLA-2/XLC-2/XLF-2/XLG-2系列。
系列操作方式阀形式轴密封
方式
用途法兰
尺寸
XLA气控式单作用
(N.C.)
波纹管密封无尘
清洁化
16~160
XLAV(带电磁阀)气控式单作用
(N.C.)
波纹管密封无尘
清洁化
16~160
XLC气控式双作用波纹管密封无尘
清洁化
16~160
XLCV(带电磁阀)气控式双作用波纹管密封无尘
清洁化
16~80
XLF气控式单作用
(N.C.)
O形圈密封高速动作
高动作次数
16~160
XLFV(带电磁阀)气控式单作用
(N.C.)
O形圈高速动作
高动作次数
16~160
XLG气控式双作用O形圈高速动作
高动作次数
16~160
XLGV(带电磁阀)气控式双作用O形圈高速动作
高动作次数
16~80
XLD气控式单作用
(N.C.)
波纹管密封
O形圈密封
防止扬尘
防止泵过载
25~160
XLDV(带电磁阀)气控式单作用
(N.C.)
波纹管密封
O形圈密封
防止扬尘
防止泵过载
25~160
XLH手动式手动波纹管密封无尘
清洁化
16~50
XLS电磁式单作用
(N.C.)
(波纹管平衡)无需空气
可搬运装置用
16,25

产品特点

■Aluminum High Vacuum Angle Valve
■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

■Possible to replace the bellows
(Bellows seal type)

Bellows assembly can be replaced which reduces maintenance costs and waste materials.

■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

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