高真空阀
铝制高真空L型阀 XLA/C/F/G
系列 | 操作方式 | 阀形式 | 轴密封 方式 | 用途 | 法兰 尺寸 |
---|---|---|---|---|---|
XLA-2 | 气控式 | 单作用 (N.C.) | 波纹管密封 | 无尘 清洁化 | 16~80 |
XLAV-2(带电磁阀) | 气控式 | 单作用 (N.C.) | 波纹管密封 | 无尘 清洁化 | 16~80 |
XLC-2 | 气控式 | 双作用 | 波纹管密封 | 无尘 清洁化 | 16~80 |
XLF-2 | 气控式 | 单作用 (N.C.) | O形圈密封 | 高速动作 高动作次数 | 16~80 |
XLFV-2(带电磁阀) | 气控式 | 单作用 (N.C.) | O形圈密封 | 高速动作 高动作次数 | 16~80 |
XLG-2 | 气控式 | 双作用 | O形圈密封 | 高速动作 高动作次数 | 16~80 |
产品特点
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
![](/newproducts/en/xla/images/02.jpg)
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
![](/newproducts/en/xla/images/03.jpg)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.