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Slit Valves

Slit Valve XGT

    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
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  • Slit Valve XGT
    Manual
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    XGTView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6		Inert gas type vacuum32 x 222
46 x 236
50 x 336		0.45 to 0.6
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