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Process Gas Equipment

Diaphragm Valve for Ultra High Purity AP

    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesTypeBody materialConnection typeConnection size
APAir operated type316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
1/2'',3/4''
APManually operated316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''

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