WEB Catalog

Product Information »  WEB Catalog  » Industrial Device Communication Equipment/Wireless System  » Industrial Device Communication Equipment: DeviceNet Compatible Products

Industrial Device Communication Equipment: DeviceNet Compatible Products

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)
Back to list

Go Top