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Product List
- Air Management System
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Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Wireless System
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
- Pilot Operated 4/5 Port Solenoid Valves
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Air Cylinders
- Standard Air Cylinders (Round Type）
- Standard Air Cylinders (Square Cover）
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Actuator Position Sensor
- Flow Control Equipment
- Standard Air Cylinders (Round Type）
- Rotary Actuators/Air Grippers
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Electric Actuators/Cylinders
- e-Actuator
- Manifold Controller/Manifold Controller Compatible Electric Actuator
- Battery-less Absolute Encoder Type
- Slider Type
- Rod Type/Guide Rod Type
- Slide Tables
- Miniature
- Rotary Tables
- Grippers
- Grippers for Collaborative Robots
- Controllers/Drivers
- Environment
- Motorless Type
- Electric Cylinders
- Card Motor
- Made to Order
- e-Actuator
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Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Vacuum Ejectors
- Vacuum Gripper System (Foam Type)
- Vacuum Release Valve Units
- Air Suction Filters
- Vacuum Pads (Vacuum Suction Cups)
- Special Pads
- Gripper for Collaborative Robots
- Vacuum Saving Valves
- Vacuum Flow
- Vacuum Regulators
- Related Equipment for Vacuum Systems
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Grippers for Collaborative Robots
- Compact Compressor
- Air Preparation Equipment
- Modular F.R.L./Pressure Control Equipment
- Modular F.R.L. Units
- Pressure Control Equipment
- Booster Regulators
- Lubrication Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
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Switches/Sensors/Controller
- Electronic Pressure Switches/Sensors (Self-contained Type)
- Electronic Pressure Switches/Sensors (Remote Type)
- Mechanical Pressure Switches
- Electronic Flow Switches/Sensors
- Clamp-on Type Flow Sensor
- Mechanical Flow Switches
- Air Management System
- Controllers
- Electronic Temperature & Humidity Switches
- Auto Switches for Air Cylinders
- Auto Switches for Rotary Actuators and Air Grippers
- Electronic Pressure Switches/Sensors (Self-contained Type)
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Static Neutralization Equipment
- Static Neutralization Equipment Ionizer Bar Type
- Static Neutralization Equipment Nozzle Type Ionizer
- Static Neutralization Equipment Fan Type Ionizer
- Static Neutralization Equipment Ionizer Gun
- Static Neutralization Equipment Desktop Duster Box
- Static Neutralization Equipment Electrostatic Sensor/Sensor Monitor/Meter
- Static Neutralization Equipment/Ionizers
- Static Neutralization Equipment Ionizer Bar Type
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Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: EtherCAT Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible Products
- Wireless System: DeviceNet Compatible Products
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
- Wireless System: PROFINET Compatible Products
- Process Valves
- Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Process Pumps(Diaphragm Pumps)
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Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Chiller Compliant Regulations
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Process Gas Equipment AP Tech
- High Vacuum Equipment
- Industrial Filters/Sintered Metal Elements
- Pneumatic Instrumentation Equipment
- Hydraulic Equipment
Theme
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Clean Series/Low-Particle Generation
- Directional Control Valves
- Air Cylinders
- Rotary Actuators
- Air Grippers
- Air Dryers
- Compressed Air Cleaning Filter Series
- Clean Gas Filters/Air Filters
- Exhaust Cleaner for Clean Room/Clean Exhaust Filter
- Modular F.R./Pressure Control Equipment
- Fittings
- Tubing
- Flow Control Equipment
- Switches/Sensors
- Flow Switch
- Electric Actuators
- Directional Control Valves
- Fluoropolymer Equipment/PVC Equipment
-
Series Compatible with Secondary Batteries Series 25A-
- Air Management System
- Directional Control Valves
- Actuators
- Related Products
- Rotary Actuators/Air Grippers
- Vacuum Equipment
- Air Preparation Equipment/Clean Air Filters
- ModularF.R.L./Pressure Control Equipment
- Flow Control Equipment/Fittings
- Tubings
- Detection Switches/Auto Switches
- Process Valves
- Process Gas Equipment
- Electric Actuators
- Air Management System
- Copper, Fluorine-free Equipment Series 20-
- ISO Products
- Arc Welding Process Equipment
- IO-Link Devices
- Grease-free Nitrogen (N2) Compatible Equipment
- List of ATEX Compliant Products
Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Water-cooled Thermo-chiller/High-performance Type HRW
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
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2D CAD
Click here for 2D CAD Water-cooled Thermo-chiller/High-performance Type HRW
Manual
Series View search result HRW View search result Water-cooled Thermo-chiller/High-performance Type HRW
DoC
Series View search result HRW View search result
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
