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Process Gas Equipment

Check Valve/Vacuum Generator/Flow Switch AP

    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations
Valve and Regulator Recommendations　Technical Data/Glossary of Terms
Green Procurement (RoHS)
SeriesTypeBody materialConnection typeConnection size
APCheck valve316L SS secondary remeltFace seal
Tube weld		1/4'', 3/8''
APVacuum generator316L SSFace seal
Tube weld		1/4'', 3/8''
APFlow switch316L SS secondary remelt
316L SS		Face seal
Tube weld		1/2'', 3/4''

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