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Aluminum High Vacuum Angle Valve
XLA/C-100・160（-1）-X152 Updated Nov-18
XLA/C-100・160（-1）-X152 Updated Nov-18
- Improved durability of bellows (Flange sizes 100 and 160)
- Service life of two million cycles
- Space required for equipment can be reduced
Without restriction on exhaust direction
(two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation - Lightweight, Compact
Product Features
■Improved durability of bellows (Flange sizes 100 and 160)
■Service life of two million cycles∗1
∗1 The service life is based on SMC's testing. Refer to the operation manual for details.
■Space required for equipment can be reduced
■Lightweight, Compact
Large conductance, small body, excellent
resistance against fluorine corrosion (body)
■Variations
