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For 300 mm wafer
Parallel Seal Type Slit Valve
XGTP Series Updated Feb-18
Parallel Seal Type Slit Valve
XGTP Series Updated Feb-18
- Long service life 3 million cycles (at ordinary temperature)
- Low particle generation Reduced by 1/5 or more
(compared with the current product) - Easier maintenance
Easy replacement of bellows
Gate can be replaced from above.(Made to order) - Safety measures
Mechanical end lock mechanism is adopted.
Product Features
■Long service life 3 million cycles (at ordinary temperature)
Low particle generation Reduced by 1/5 or more
Low particle generation Reduced by 1/5 or more
■Low particle generation and longer service life through the use of
a parallel sealing motion
a parallel sealing motion
The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.
■Easier maintenance
Easy replacement of bellows
Gate can be replaced from above.(Made to order)
■Related Products
