Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
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Thermo-chiller/High-performance Inverter Type HRZ
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
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・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | −20 to 90℃ 10 to 60℃ | 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
