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NAMUR Interface 3-Port Solenoid Valve VFN200N

Pneumatic Instrumentation Equipment » Solenoid Valves
    ・The interface surface is compliant with NAMUR Standards.
    　Can be directly installed on industrial valve actuators that comply with NAMUR
  • NAMUR Interface 3-Port Solenoid Valve VFN200N
    DoC
    Series View search result
    VFN200NView search result
Safety Instructions　Automation Example　Specific Product Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Power consumption (W)
VFN200N5.410.311.381.8

Electro-Pneumatic Transducer IT600/601

Pneumatic Instrumentation Equipment » Electro-Pneumatic Transducers
    ・Air pressure in proportion to the current signal can be output.
    ・Wide output pressure range: 0.02 to 0.6 MPa
    ・Fast response
    ・Independent electric unit/Explosion-proof (flameproof) construction
    ・Easy span adjustment
Safety Instructions　Automation Example　Green Procurement (RoHS)
SeriesPort sizeSupply air pressure (MPa)Input current
IT600Rc1/40.14 to 0.244 to 20 mA DC
IT601Rc1/40.24 to 0.74 to 20 mA DC

Booster Relay IL100/XT240

Pneumatic Instrumentation Equipment » Relays/Valves
Features
    ・Used when the piping distance between the instrumentation and operational area is long, or when the operational area has a large capacity
    ・Can help accelerate actuation speed considerably
  • Booster Relay IL100/XT240
    Manual
    Series View search result
    IL100View search result
    XT240
Safety Instructions　Automation Example　Green Procurement (RoHS)
SeriesPort sizePressure ratioInput/Output pressure
IL100Rc1/4, 3/81：10.7 MPa
XT240Rc. NPT 1/4 (SIG), 1 (SUP. OUT)1：10.7 MPa

Industrial Filter/Vessel Series FGD

Industrial Filters/Sintered Metal Elements » Industrial Filters
    ・Ideal for low-flow filtration (Max. 60 L/min)
    ・It is possible to select the antistatic specification (FGDE, FGDF).
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Industrial Filter/Vessel Series FGD
    Manual
    Series View search result
    FGDView search result
Safety Instructions　Industrial Filters/Precautions　Selection　Green Procurement (RoHS)
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FGDRc3/8，1/2，3/40.7, 1 MPaMAX. 80

Rodless Cylinder for Vacuum CYV

High Vacuum Equipment » Rodless Cylinders for Vacuum
    ・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Rodless Cylinder for Vacuum CYV
    Manual
    Series Bore size (mm) View search result
    CYV15, 32View search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environment pressure
[Pa (ABS)]		Bore size (mm)
CYVAtmosphere to 1.3 x 10-415, 32

For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

High Vacuum Equipment » Slit Valves
Features
    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
    　(compared with the existing product)
    ・Easier maintenance
    　Easy replacement of bellows
    　Gate can be replaced from above. (Made to order)
    ・Safety measures
    　A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTPView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTPAtmospheric pressure
to 10-6		Inert gas50 x 3360.45 to 0.6

Aluminum High Vacuum Angle Valve XLA/C/F/G

High Vacuum Equipment » High Vacuum Valves
Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

Peltier-Type Thermo-con/Rack Mount Type 
HECR

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
Features
    ・Good space utilization: Mountable in a 19-inch rack
    　Saves space by allowing multiple pieces of equipment to be mounted
    　together in a rack.
    ・Temperature stability: ±0.01℃ to 0.03℃
    ・Set temperature range: 10℃ to 60℃
    ・Cooling capacity: 200 W, 400 W, 510 W, 800 W, 1 kW, 1.2 kW
    ・Power consumption: 200 W, 300 W, 400 W
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method
HECR002-A10 to 60℃200 W±0.01 to 0.03℃Peltier-type air-cooled
HECR004-A10 to 60℃400 W±0.01 to 0.03℃Peltier-type air-cooled
HECR006-A10 to 60℃510 W±0.01 to 0.03℃Peltier-type air-cooled
HECR006L-A10 to 60℃510 W±0.01 to 0.03℃Peltier-type air-cooled
HECR008-A10 to 60℃800 W±0.01 to 0.03℃Peltier-type air-cooled
HECR010-A10 to 60℃1 kW±0.01 to 0.03℃Peltier-type air-cooled
HECR008-W10 to 60℃800 W±0.01 to 0.03℃Peltier-type water-cooled
HECR012-W10 to 60℃1.2 kW±0.01 to 0.03℃Peltier-type water-cooled

Thermo-chiller/Rack Mount Type HRR

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
Features
    ・Operable without the need to remove the unit from the rack
    　Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
    ・Space saving: Multiple chillers can be mounted to a 19-inch rack.
    ・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
    ・Temperature stability: ±0.1℃
    ・Global power supply:
    　Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
    　Single-phase 200 to 230 VAC (50/60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Rack Mount Type HRR
    Manual
    Series View search result
    HRRView search result
  • Thermo-chiller/Rack Mount Type HRR
    DoC
    Series View search result
    HRRView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRR5 to 35℃
15 to 35℃		1.1 kW
1.2 kW
1.8 kW
2.4 kW
3.0 kW
5.1 kW		±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
Features
    ・Temperatures for 2 fluid channel systems can be controlled individually
    　by one chiller.
    ・Space saving, Reduced wiring
    　Footprint: 22% reduction
    　One power supply system for 2 channels
    ・Energy saving
    　Power consumption reduced by 30%
    ・Touch panel
    ・Power supply:
    　3-phase 200 VAC (50 Hz)
    　3-phase 200 to 230 VAC (60 Hz)
    　3-phase 380 to 415 VAC (50/60 Hz)
    　3-phase 460 to 480 VAC (60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
    Manual
    Series Cooling capacity View search result
    HRL100CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL200CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL300CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL400CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
    DoC
    Series Cooling capacity View search result
    HRL100CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL200CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL300CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL400CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRL100CH1: 15 to 35℃ CH2: 10 to 40℃CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigeration, Water-cooled refrigerationTap water, Deionized water
HRL200CH1: 15 to 35℃ CH2: 10 to 40℃CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigeration, Water-cooled refrigerationTap water, Deionized water
HRL300CH1: 15 to 35℃ CH2: 10 to 40℃CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigerationTap water, Deionized water
HRL400CH1: 15 to 35℃ CH2: 10 to 40℃CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigerationTap water, Deionized water

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