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Auto Drain Valve AD402-A
Air Preparation Equipment » Auto Drains/Differential Pressure Gauges-
・Improved foreign matter resistance
・Increase in condensate discharge
Drain discharge: Max. 100 cm3/cycle (3 times that of the existing model)
・Improved environmental resistance: Transparent bowl guard can protect the inner
bowl
・Improved visibility: 360°
・Lightweight: Weight reduced by 22%
・Reduced required maintenance space
・Easier maintenance
One-touch mounting and removal of the bowl is possible without using any tools.
・Bowl material can be selected according to the operating environment.
Series | Port size | Drain port size |
---|---|---|
AD402-A | 1/4, 3/8, 1/2 | 3/8 |
Clean Gas Filter SF
Air Preparation Equipment » Air Preparation FiltersClean Series/Low-Particle Generation » Clean Gas Filters/Air Filters

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・Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
・Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
Safety Instructions Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Type | Series | Operating pressure | Filtration (μm) |
---|---|---|---|
Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB100 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB200 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 120 |
Disposable type straight | SFB300 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Disposable type multiple disc | SFC100 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Line Filter AFF
Mist Separator AM
Micro Mist Separator AMD
Activated Carbon Filter AMK
Air Preparation Equipment » Air Preparation Filters-
・Modular connection type
・Compressed air purity class: ISO 8573
・Face-to-face and depth dimensions reduced by 30%
・Weight reduced by 50%
AFF/AM□20: 0.19 kg (Existing model: 0.38 kg)
・Flow capacity increased by 50%
・No tools are required.
Easy replacement of the element
・Transparent bowl guard (2-layer construction)
・Color-identifiable elements
・With element service indicator
・With clogging switch/With element service indicator
Safety Instructions Air Preparation Equipment/Precautions Selection/Technical Data Green Procurement (RoHS) Element Part No.
Type | Series | Filtration (μm) | Oil mist concentration on the outlet side | Air flow (L/min[ANR]) | Port size |
---|---|---|---|---|---|
Line filter | AFF | 1.0 (Filtration efficiency: 99%) | - | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Mist separator | AM | 0.1 (Filtration efficiency: 99%) | 1 (≈ 0.8 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Micro mist separator | AMD | 0.01 (Filtration efficiency: 99.9%) | 0.1 (≈ 0.08 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Activated carbon filter | AMK | - | 0.003 (≈ 0.0025 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Adsorption Plate SP
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Related Equipment for Vacuum Systems
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・Ideal for the adsorption and fixing in place of thin sheets, glass panels, and soft workpieces
Workpieces will not be deformed since they are adsorbed with multiple micro air vents on the adsorption surface.
・A high level of machining accuracy
・Strong adsorption force
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Shape | Adsorption surface size | Sintered metallic element particle dia. | Suction port |
---|---|---|---|---|
SP | Rectangular, Square | □50 x 50 mm, □100 x 100 mm, □150 x 150 mm □200 x 200 mm, □250 x 250 mm, □300 x 300 mm | φ0.3 (Sphere) | 1/8 |
Vacuum Manifold for Fieldbus System ZKJ
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump SystemsIndustrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFINET Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherNet/IP Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherCAT Compatible Products
IO-Link Devices » Vacuum Unit/Vacuum Manifold
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・Vacuum pads and actuator driving can be controlled with a single
manifold [New]
・Positive pressure unit [New]
5-port solenoid valve
・Vacuum unit
Energy saving ejector Air consumption: 92% reduction
・Fieldbus compatible
Space saving: Requires no separate input/output units
Reduced wiring time
Compatible protocols: PROFINET, IO-Link, EtherNet/IP, EtherCAT
・Exhaust sealing function
Quick workpiece release
・4 stations/8 stations/12 stations/16 stations manifold compatible
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Ejector series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] |
---|---|---|---|
ZKJ07 | 0.7 | 31 | 26 |
ZKJ10 | 1.0 | 53 | 48 |
ZKJ12 | 1.2 | 63 | 68 |
ZKJ15 | 1.5 | 74 | 102 |
Vacuum Unit (Vacuum Generators) ZK2□A
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems-
・Supply valve: An N.O. specification has been added.
Can hold vacuum∗ even when the power goes out or is turned off
Prevents the sudden dropping of workpieces∗
∗ Supposing the supply pressure is being maintained
・An IO-Link compatible pressure switch has been added.
Allows for ejector control with a single communication line
Reading of the device information and parameter batch settings are
possible.
・Compatible with ejector systems and vacuum pump systems
・Energy saving ejector
Air supply is cut-off when vacuum is reached.
Air consumption: 93% reduction (Under SMC’s measurement conditions)
・More efficient ejector: Suction flow increased by 50% (Compared to other
SMC 1-stage ejectors)
・Energy saving efficiency: 93% reduction
・Improved low noise and suction flow by adoption of a high-noise
reduction silencer
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Ejector series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
---|---|---|---|---|---|
ZK2□07 | 0.7 | 29 | 24 | 2 to 40 | ZK2□00 |
ZK2□10 | 1.0 | 44 | 40 | 2 to 50 | ZK2□00 |
ZK2□12 | 1.2 | 61 | 58 | 2 to 125 | ZK2□00 |
ZK2□15 | 1.5 | 67 | 90 | 2 to 150 | ZK2□00 |
Electric Stopper Cylinder (Made to Order) LEBQ
Electric Actuators/Cylinders » Made to Order
-
・Suitable for conveyor lines without an air supply
・Available rod end shapes:
Chamfered type, roller type, and lever type
・Energy saving
The power consumption at rod stoppage is reduced by 60%.
・Height and mounting methods are compatible with the stopper cylinder RSQ series.
・Easy setting
Easy adjustment on site with a programless controller
Applicable to the controller LEC series which allows detailed settings
・Compatible controllers: LECP6, LECP1
Series | Stroke (mm) | Pushing force (N) | Speed (mm/s) | Screw lead (mm) |
---|---|---|---|---|
LEBQ32 | 20 | 30 | 80 | 5 |
LEBQ50 | 30 | 150 | 135 | 8 |
Electric Cylinder LZB/LDZB/LZC/LDZC
Electric Actuators/Cylinders » Electric Cylinders
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・It can be operated like an air cylinder.
・With auto switch (LDZB series: LDZB, LDZC series: LDZC)
Series | Max. thrust | Max. speed | Lead screw type | Stroke (mm) |
---|---|---|---|---|
LZB | 196 N or more | 200 mm/s or more | Slide screw : ø8, ø12 Lead : 2 mm, 6 mm, 12 mm | 25, 40, 50 100, 200 |
LZC | 196 N or more | 200 mm/s or more | Slide screw : ø8, ø12 Lead : 2 mm, 6 mm, 12 mm | 25, 40, 50 100, 200 |
Electric Actuator 25A-
Electric Actuators/Cylinders » EnvironmentSeries Compatible with Secondary Batteries Series 25A- » Electric Actuators
Safety Instructions Features Related Products Precautions Green Procurement (RoHS) Actuator Cable I/O Cable
Series | Model | Specification |
---|---|---|
Electric actuator | 25A-EQFS | e-Actuator Integrated Controller / Slider Type / Battery-less Absolute |
Electric actuator | 25A-EQY | e-Actuator Integrated Controller / Rod Type / Battery-less Absolute |
Electric actuator | 25A-LEFS | Slider type/Step motor, Servo motor: Applicable to the JXC□/LEC□ |
Electric actuator | 25A-LEFS | Slider type/AC servo motor: Applicable to the LECS□ |
Electric actuator | 25A-LEFS | Slider type/AC servo motor: Applicable to the LECY□ |
Electric actuator | 25A-LEJS | High rigidity slider type/AC servo motor: Applicable to the LECS□ |
Electric actuator | 25A-LEJS | High rigidity slider type/AC servo motor: Applicable to the LECY□ |
Electric actuator | 25A-LEY | Rod type/Step motor, Servo motor: Applicable to the JXC□/LEC□ |
Electric actuator | 25A-LEY | Rod type/AC servo motor: Applicable to the LECS□ |
Electric actuator | 25A-LEY | Rod type/AC servo motor: Applicable to the LECY□ |
Electric Actuator/Slider Type, Ball Screw Drive 11-LEFS
Clean Series/Low-Particle Generation » Electric ActuatorsElectric Actuators/Cylinders » Environment

Clean Series
LEFS Series Step Motor (Servo/24 VDC), Servo Motor (24 VDC)
・Max. work load: 60 kg
・Positioning repeatability: ±0.02 mm
LEFS Series AC Servo Motor
・High output motor (100/200/400 W)
・Improved high speed transfer ability
・High acceleration/deceleration (20000 mm/s2)
・Pulse input type
・With internal absolute encoder
・Positioning repeatability: ±0.02 mm
・Motorless specification is available. Click here for details
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
CE/UL-compliance List Actuator Cable I/O Cable
CE/UL-compliance List Actuator Cable I/O Cable
Specification | Model | Stroke (mm) | Work load (kg) Horizontal | Speed (mm/s) | Screw lead (mm) |
---|---|---|---|---|---|
Step motor (Servo/24 VDC) | 11-LEFS16 | 50 to 500 | Max. 14 | Max. 500 | 5,10 |
Step motor (Servo/24 VDC) | 11-LEFS25 | 50 to 600 | Max. 25 | Max. 500 | 6,12 |
Step motor (Servo/24 VDC) | 11-LEFS32 | 50 to 800 | Max. 45 | Max. 500 | 8,16 |
Step motor (Servo/24 VDC) | 11-LEFS40 | 150 to 1000 | Max. 55 | Max. 500 | 10,20 |
Servo motor (24 VDC) | 11-LEFS16A | 50 to 500 | Max. 10 | Max. 500 | 5,10 |
Servo motor (24 VDC) | 11-LEFS25A | 50 to 600 | Max. 18 | Max. 500 | 6,12 |
AC servo motor (100/200/400 W) | 11-LEFS25S | 50 to 600 | Max. 20 | Max. 900 | 6,12 |
AC servo motor (100/200/400 W) | 11-LEFS32S | 50 to 800 | Max. 45 | Max. 1000 | 8,16 |
AC servo motor (100/200/400 W) | 11-LEFS40S | 150 to 1000 | Max. 60 | Max. 1000 | 10,20 |