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Compact Vacuum Pad (Vacuum Suction Cup) ZP3
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Pads (Vacuum Suction Cups)-
・Overall length shortened
・Pad form: Flat type, Flat type with groove, Bellows type, Bellows type with ribs
・Mounting: Male thread, Female thread
・Vacuum inlet direction: Vertical, Lateral
・Vacuum inlet: Male thread, Female thread, One-touch fitting, Barb fitting
・Buffer: Without, With
[Buffer stroke [mm]: 3, 6, 10, 15, 20]
Safety Instructions Vacuum Equipment/Precautions Vacuum Pads/Precautions Series Variations Model Selection Mounting Bracket Assembly (p.162-164) Green Procurement (RoHS)
Series | Pad form | Pad diameter(mm) |
---|---|---|
ZP3 | Flat type | φ1.5,φ2,φ3.5 |
ZP3 | Flat type with groove | φ4,φ6,φ8,φ10,φ13,φ16 |
ZP3 | Bellows type | φ4,φ6,φ8 |
ZP3 | Bellows type with ribs | φ10,φ13,φ16 |
Air Suction Filter with One-touch Fittings ZFB
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
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・Prevents problems related to vacuum circuits or airborne contaminants
・Vacuum tubes can be connected and removed by a one-touch operation.
Series | Applicable tubing O.D. Metric | Applicable tubing O.D. Inch | Flow rate L/min (ANR) | Filtration (μm) |
---|---|---|---|---|
ZFB10 | φ4, φ6 | φ3/16, φ1/4 | 10 to 20 | 30 |
ZFB20 | φ6, φ8 | φ1/4 | 30 to 50 | 30 |
ZFB30 | φ8, φ10 | φ3/8 | 75 | 30 |
ZFB40 | - | φ1/2 | 100 | 30 |
Electric Gripper 2-Finger Type/With Dust Cover (ZJ Type) LEHZJ
Electric Actuators/Cylinders » Grippers
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・Easy setting: Data can be set with only 2 items, position and force.
The controller is already set with the data of the actuator.
(The actuator and controller are provided as a set.)
・Equipped with a drop prevention function
(All series come equipped with a self-lock mechanism.)
・The self-lock mechanism reduces power consumption.
・Equipped with a gripping check function
・It is possible to set the position, speed, and force. (64 points)
Safety Instructions Electric Actuators/Precautions Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS) CE/UL-compliance List Actuator Cable I/O Cable
Series | Body size | Open and close stroke/ both sides (mm) | Gripping force [N] Basic | Gripping force [N] Compact | Opening and closing speed (mm/s) |
---|---|---|---|---|---|
LEHZJ | 10 | 4 | 6 to 14 | 3 to 6 | 5 to 80 |
LEHZJ | 16 | 6 | 6 to 14 | 4 to 8 | 5 to 80 |
LEHZJ | 20 | 10 | 16 to 40 | 11 to 28 | 5 to 100 |
LEHZJ | 25 | 14 | 16 to 40 | 11 to 28 | 5 to 100 |
Electric Slide Table/High Rigidity Type LESH
Electric Actuators/Cylinders » Slide Tables
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・Easy setting: Data can be set with only 2 items, position and speed.
The controller is already set with the data of the actuator.
(The actuator and controller are provided as a set.)
・Integrated guide rail and table
Uses a recirculating linear guide for high rigidity and high precision
・Reduced cycle time
Max. acceleration/deceleration: 5000 mm/s2
Max. speed: 400 mm/s
・Max. pushing force: 180 N
・Positioning repeatability: ±0.05 mm
Safety Instructions Electric Actuators/Precautions Features Series Variations Simplified Selection Flow Chart Green Procurement (RoHS) CE/UL-compliance List Actuator Cable I/O Cable
Specification | Model | Stroke (mm) | Work load (kg) Horizontal | Work load (kg) Vertical | Speed (mm/s) | Screw lead (mm) |
---|---|---|---|---|---|---|
Step motor (Servo/24 VDC) | LESH8□ | 50,75 | Max. 2 | Max. 0.5 | Max. 400 | 4,8 |
Step motor (Servo/24 VDC) | LESH16□ | 50,100 | Max. 8 | Max. 2 | Max. 400 | 5,10 |
Step motor (Servo/24 VDC) | LESH25□ | 50,100,150 | Max. 12 | Max. 4 | Max. 400 | 8,16 |
Servo motor (24 VDC) | LESH8□A | 50,75 | Max. 2 | Max. 0.5 | Max. 400 | 4,8 |
Servo motor (24 VDC) | LESH16□A | 50,100 | Max. 5 | Max. 2 | Max. 400 | 5,10 |
Servo motor (24 VDC) | LESH25□A | 50,100,150 | Max. 6 | Max. 2.5 | Max. 400 | 8,16 |
Shot Pin Cylinder CKZP
Air Cylinders » Pin Shift Cylinder-
・High precision
With rod extended: Deflection of ±0.1 mm or less
Non-rotational accuracy: ±0.1 mm or less
・Positioning repeatability
Positioning accuracy: ±0.05 mm, Distance accuracy: ±0.1 mm
・High output: Retract force: 1764 N, Extending force: 2362 N
・Mounting Based on NAAMS Standard (71 mm bore)
Series | Bore size (mm) | Stroke (mm) |
---|---|---|
CKZP | 57, 71 | 25, 50 |
Mechanical Valve VM/VZM/VFM
Directional Control Valves » Mechanical Valves/Transmitters-
・A wide variety of valves are available for all types of air systems.
・Small mounting space with a compact body
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Series Variation Selection/Technical Data Green Procurement (RoHS)
Description | Series | Number of ports |
---|---|---|
Mechanical valve | VM1000 | 2/3 ports |
Mechanical valve | VM100,VM200 | 2/3 ports |
Mechanical valve | VM400 | 3 ports |
Mechanical valve | VZM500,VZM400 | 5 ports |
Mechanical valve | VFM300,VFM200 | 5 ports |
Mechanical valve | VM800 | 3 ports |
Compact Vacuum Unit ZQ□A
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump SystemsIO-Link Devices » Vacuum Manifold
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・Vacuum pressure switch with energy saving function
Air consumption: 90% reduction (Based on SMC’s measurement
conditions)
Power consumption: 60% reduction [1 W (Existing model) → 0.4 W]
Vacuum release pressure: From 0 MPa [From 0.3 MPa (Existing model) →
From 0 MPa]
Copy function: Reduced setting labor, Minimized risk of setting mistakes
・Compatible with ejector systems and vacuum pump systems
・IO-Link compatible
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Ejector series | Nozzle diameter (mm) | Max. suction flow [L/min(ANR)] | Air consumption [L/min(ANR)] | Guidelines for applicable pad (mm) | Vacuum pump system series |
---|---|---|---|---|---|
ZQ05 | 0.5 | 5 | 15 | 2 to 13 | ZQ000□ |
ZQ07 | 0.7 | 10 | 25 | 2 to 20 | ZQ000□ |
ZQ10 | 1.0 | 22 | 47 | 2 to 32 | ZQ000□ |
Rotary table 11-/22-MSQ
Clean Series/Low-Particle Generation » Rotary Actuators
Safety Instructions Rotary Actuator Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Rotary actuators precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Rotary actuators precautions Auto Switches/Precautions Green Procurement (RoHS)
Series | Rack type | Size Basic type MSQB | Size High precision type MSQA | Rotating angle |
---|---|---|---|---|
11-/22-MSQ | Double | 1, 2, 3, 7, 10, 20, 30, 50 | 1, 2, 3, 7, 10, 20, 30, 50 | 0 to 190° |
Diaphragm Valve for Ultra High Purity AP
Process Gas Equipment » Process Gas Equipment
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・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
Series | Description | Type | Body material |
---|---|---|---|
AP | For Ultra High Purity | Air Operated Type Diaphragm Valve | 316L SS secondary remelt |
AP | For Ultra High Purity | Manually Operated Type Diaphragm Valve | 316L SS secondary remelt |
AP | For Ultra High Purity | Metering Valve | 316L SS secondary remelt |
AZ | For Ultra High Purity | Air Operated Type Diaphragm Valve | SUS316L |
AZ | For Ultra High Purity | Manually Operated Type Diaphragm Valve | SUS316L |
AZ | For Ultra High Purity | Metering Valve | SUS316L |
AK | For General Applications | Air Operated Type Diaphragm Valve | SUS316 |
AK | For General Applications | Manually Operated Type Diaphragm Valve | SUS316 |
AK | For General Applications | Metering Valve | SUS316 |
General Purpose Pressure Switch/Snap Switch Type ISG
Switches/Sensors/Controller » Mechanical Pressure Switches
-
・For general fluids
・Equivalent to IP44
・With neon light
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Series | Type | Set pressure range |
---|---|---|
ISG11□, 21□ | Positive pressure | 0.02 to 0.3 MPa |
ISG12□, 22□ | Positive pressure | 0.05 to 0.7 MPa |
ISG13□, 23□ | Positive pressure | 0.1 to 1.0 MPa |
IS2761 | Positive pressure | 0.1 to 1.0 MPa |
ISG19□, 29□ | Vacuum pressure | -10 to -100 kPa |