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Compact Vacuum Pad (Vacuum Suction Cup) ZP3

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Pads (Vacuum Suction Cups)
    ・Overall length shortened
    ・Pad form: Flat type, Flat type with groove, Bellows type, Bellows type with ribs
    ・Mounting: Male thread, Female thread
    ・Vacuum inlet direction: Vertical, Lateral
    ・Vacuum inlet: Male thread, Female thread, One-touch fitting, Barb fitting
    ・Buffer: Without, With
     [Buffer stroke [mm]: 3, 6, 10, 15, 20]
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesPad formPad diameter(mm)
ZP3Flat typeφ1.5,φ2,φ3.5
ZP3Flat type with grooveφ4,φ6,φ8,φ10,φ13,φ16
ZP3Bellows typeφ4,φ6,φ8
ZP3Bellows type with ribsφ10,φ13,φ16

Air Suction Filter with One-touch Fittings ZFB

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
    ・Prevents problems related to vacuum circuits or airborne contaminants
    ・Vacuum tubes can be connected and removed by a one-touch operation.
SeriesApplicable tubing O.D.
Metric
Applicable tubing O.D.
Inch
Flow rate
L/min (ANR)
Filtration (μm)
ZFB10φ4, φ6φ3/16, φ1/410 to 2030
ZFB20φ6, φ8φ1/430 to 5030
ZFB30φ8, φ10φ3/87530
ZFB40-φ1/210030

Electric Gripper 2-Finger Type/With Dust Cover (ZJ Type) LEHZJ

Electric Actuators/Cylinders » Grippers
    ・Easy setting: Data can be set with only 2 items, position and force.
     The controller is already set with the data of the actuator.
     (The actuator and controller are provided as a set.)
    ・Equipped with a drop prevention function
     (All series come equipped with a self-lock mechanism.)
    ・The self-lock mechanism reduces power consumption.
    ・Equipped with a gripping check function
    ・It is possible to set the position, speed, and force. (64 points)
SeriesBody
size
Open and close stroke/
both sides
(mm)
Gripping
force [N]
Basic
Gripping
force [N]
Compact
Opening and
closing speed
(mm/s)
LEHZJ1046 to 143 to 65 to 80
LEHZJ1666 to 144 to 85 to 80
LEHZJ201016 to 4011 to 285 to 100
LEHZJ251416 to 4011 to 285 to 100

Electric Slide Table/High Rigidity Type LESH

Electric Actuators/Cylinders » Slide Tables
    ・Easy setting: Data can be set with only 2 items, position and speed.
     The controller is already set with the data of the actuator.
     (The actuator and controller are provided as a set.)
    ・Integrated guide rail and table
     Uses a recirculating linear guide for high rigidity and high precision
    ・Reduced cycle time
     Max. acceleration/deceleration: 5000 mm/s2
     Max. speed: 400 mm/s
    ・Max. pushing force: 180 N
    ・Positioning repeatability: ±0.05 mm
SpecificationModelStroke
(mm)
Work load (kg)
Horizontal
Work load (kg)
Vertical
Speed
(mm/s)
Screw lead
(mm)
Step motor
(Servo/24 VDC)
LESH8□50,75Max. 2Max. 0.5Max. 4004,8
Step motor
(Servo/24 VDC)
LESH16□50,100Max. 8Max. 2Max. 4005,10
Step motor
(Servo/24 VDC)
LESH25□50,100,150Max. 12Max. 4Max. 4008,16
Servo motor
(24 VDC)
LESH8□A50,75Max. 2Max. 0.5Max. 4004,8
Servo motor
(24 VDC)
LESH16□A50,100Max. 5Max. 2Max. 4005,10
Servo motor
(24 VDC)
LESH25□A50,100,150Max. 6Max. 2.5Max. 4008,16

Shot Pin Cylinder CKZP

Air Cylinders » Pin Shift Cylinder
    ・High precision
     With rod extended: Deflection of ±0.1 mm or less
     Non-rotational accuracy: ±0.1 mm or less
    ・Positioning repeatability
     Positioning accuracy: ±0.05 mm, Distance accuracy: ±0.1 mm
    ・High output: Retract force: 1764 N, Extending force: 2362 N
    ・Mounting Based on NAAMS Standard (71 mm bore)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesBore size (mm)Stroke (mm)
CKZP57, 7125, 50

Mechanical Valve VM/VZM/VFM

Directional Control Valves » Mechanical Valves/Transmitters
    ・A wide variety of valves are available for all types of air systems.
    ・Small mounting space with a compact body
DescriptionSeriesNumber of ports
Mechanical valveVM10002/3 ports
Mechanical valveVM100,VM2002/3 ports
Mechanical valveVM4003 ports
Mechanical valveVZM500,VZM4005 ports
Mechanical valveVFM300,VFM2005 ports
Mechanical valveVM8003 ports

Compact Vacuum Unit ZQ□A

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
IO-Link Devices » Vacuum Manifold
    ・Vacuum pressure switch with energy saving function
     Air consumption: 90% reduction (Based on SMC’s measurement
     conditions)
     Power consumption: 60% reduction [1 W (Existing model) → 0.4 W]
     Vacuum release pressure: From 0 MPa [From 0.3 MPa (Existing model) →
     From 0 MPa]
     Copy function: Reduced setting labor, Minimized risk of setting mistakes
    ・Compatible with ejector systems and vacuum pump systems
    ・IO-Link compatible
Ejector seriesNozzle diameter
(mm)
Max. suction flow
[L/min(ANR)]
Air consumption
[L/min(ANR)]
Guidelines for applicable pad
(mm)
Vacuum pump system series
ZQ050.55152 to 13ZQ000□
ZQ070.710252 to 20ZQ000□
ZQ101.022472 to 32ZQ000□

Rotary table 11-/22-MSQ

Clean Series/Low-Particle Generation » Rotary Actuators
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesRack typeSize
Basic type MSQB
Size
High precision type MSQA
Rotating angle
11-/22-MSQDouble1, 2, 3, 7, 10, 20, 30, 501, 2, 3, 7, 10, 20, 30, 500 to 190°

Diaphragm Valve for Ultra High Purity AP

Process Gas Equipment » Process Gas Equipment
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

General Purpose Pressure Switch/Snap Switch Type ISG

Switches/Sensors/Controller » Mechanical Pressure Switches
SeriesTypeSet pressure range
ISG11□, 21□Positive pressure0.02 to 0.3 MPa
ISG12□, 22□Positive pressure0.05 to 0.7 MPa
ISG13□, 23□Positive pressure0.1 to 1.0 MPa
IS2761Positive pressure0.1 to 1.0 MPa
ISG19□, 29□Vacuum pressure-10 to -100 kPa

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