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Rotary Actuated Air Gripper 3-Finger Type 11-/22-MHR3/MDHR3
Clean Series/Low-Particle Generation » Air Grippers
Clean Series
・A vertically compact configuration has been achieved through the use of a rotary actuator as the drive force source.
・Supports class 10 clean room.
Safety Instructions Air Grippers Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Air Grippers/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Air Grippers/Precautions Auto Switches/Precautions Green Procurement (RoHS)
| Series | Bore size (mm) |
|---|---|
| 11-/22-MHR3 | Nominal size 10, 15 |
Air Cylinder 10-/11-/21-/22-CA2
Clean Series/Low-Particle Generation » Air Cylinders
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
| Type | Series | Action | Bore size (mm) |
|---|---|---|---|
| Standard | 10-/11-/21-/22-CA2 | Double acting, Single rod | 40, 50, 63 |
5 Port Solenoid Valve 10-SZ
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
＊The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
| Series | Sonic conductance: C | Cylinder size | Power consumption (W) |
|---|---|---|---|
| 10-SZ3000 | 0.77dm3(s・bar) | φ32 | 0.6 |
Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
High Vacuum Equipment » High Vacuum Valves
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・One-touch connection and release (No tools are required.)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XLAQ | Air operated | Bellows seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 16 to 50 |
| XLDQ | Air operated | Bellows seal O-ring seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 40, 50 |
Compact Type High Purity Air Operated Chemical Liquid Valve LVD
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
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・Space saving, compact model is available.
Dimension across inlet/outlet ports: Reduced by up to 29%
・Body material: New PFA
・Diaphragm material: PTFE
・Actuator materials: PPS, PVDF (LVD-F/FN)
Note) Tubing O.D. for the tube extension type
Safety Instructions Series Variations Work Procedure Instructions/LQ1, 2 Fitting Procedure/LQ3 Green Procurement (RoHS)
| Series | Type | Valve type | Applicable tubing O.D. Note) Metric size | Applicable tubing O.D. Note) Inch size | Orifice diameter (mmø) |
|---|---|---|---|---|---|
| LVD | Integrated fittings | N.C./N.O./ Double acting | 3 to 19 | 1/8 to 3/4 | 2 to 16 |
| LVD | Tube extensions | N.C./N.O./ Double acting | 6 to 19 | 1/4 to 3/4 | 4 to 16 |
| LVD-F/FN | LQ1 Integrated fittings | N.C./N.O./ Double acting | 3 to 25 | 1/8 to 1 | 4 to 22 |
| LVD-F/FN | LQ3 Integrated fittings | N.C./N.O./ Double acting | 6 to 25 | 1/4 to 1 | 4 to 22 |
| LVD-F/FN | Tube extensions | N.C./N.O./ Double acting | 6 to 25 | 1/4 to 1 | 4 to 22 |
High Purity Air Operated Chemical Liquid Valve JLV20/30/40/50
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
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・Suppresses the generation of particles and reduced footprint!
The special structure allows for reduced impact when the valve is closed
as well as particle generation suppression.
Reduced footprint (Compared to the existing model):
Valve width reduced by 20%, Mounting pitch reduced by 45%
・Applicable for applications requiring high pressure/high back pressure
Operating pressure: 0 to 0.5 MPa, Back pressure: 0 to 0.5 MPa
(Improved by 66% compared to the existing model)
| Series | Type | Valve type | Applicable tubing O.D. Inch | Orifice diameter (mmø) |
|---|---|---|---|---|
| JLV | Air operated Integrated fitting | N.C. | 1/4，3/8，1/2，3/4 | 4，8，10，16 |
High Speed 2 Port Valve (2 Way Valve) SX10
Process Valves » Compact 2/3 Port Solenoid Valves
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・High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
・Long service life: 5 billion cycles or more
・High frequency: 1200 Hz
・Width: 9 mm
・Low power consumption: 4 W
| Series | Flow rate (L/min) | Power consumption (W) | Max. operating frequency (Hz) |
|---|---|---|---|
| SX10 | 50 | 80 40 10 4 | 1200 1000 550 350 |
| SX10 | 100 | 80 40 10 4 | 650 550 300 200 |
| SX10 | 150 | 80 40 10 4 | 600 500 250 150 |
3-Color Display Digital Flow Switch for Water PF3W-Z/L
Switches/Sensors/Controller » Electronic Flow Switches/SensorsIO-Link Devices » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
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・Applicable fluid: Water, Ethylene glycol aqueous solution
・Lightweight: Max. 53% reduction (40 L/min, With temperature sensor)
・IO-Link compatible
・3-color/2-screen display
・Compatible with the temperature sensor & flow adjustment valve
・Fluid temperature: 0 to 90℃
・Compatible with the PFG200 series 3-screen display 4-channel flow
monitor
▶IO-Link Master
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS) IO-Link Master
Green Procurement (RoHS) IO-Link Master
| Series | Rated flow range (L/min) |
|---|---|
| PF3W-Z | 0.5 to 4 2 to 16 5 to 40 10 to 100 |
| PF3W-L (IO-Link compatible) | 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 |
3-Screen Display High-Precision Digital Pressure Switch
ISE7□/7□G/79S
Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Self-contained Type)IO-Link Devices » Pressure Switches
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
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・It is possible to change the settings while checking the measured value.
・IO-Link
・Angled display
Good visibility from various mounting positions
・Rotating display
Display can rotate 336 degrees after installation
・Applicable fluid：Air, Non-corrosive gas, Non-flammable gas (ISE70/71)
：Liquid or gas that will not corrode materials of parts
in contact with fluid (ISE7□G/79S)
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
| Series | Type | Rated pressure range |
|---|---|---|
| ISE70 | Positive pressure (For air) | 0 to 1MPa |
| ISE71 | Positive pressure (For air) | 0 to 1.6MPa |
| ISE70G | Positive pressure (For general fluids) | 0 to 1MPa |
| ISE75G | Positive pressure (For general fluids) | 0 to 2MPa |
| ISE76G | Positive pressure (For general fluids) | 0 to 5MPa |
| ISE77G | Positive pressure (For general fluids) | 0 to 10MPa |
| ISE78G | Positive pressure (For general fluids) | 0 to 16MPa |
| ISE79S | Positive pressure (For general fluids) | 0 to 50MPa |
Compact Digital Pressure Switch ZSE10(F)/ISE10
Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Self-contained Type)
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・Low profile 9.8 mm
・Vertical mounting space reduced to approx. 1/2
(Compared to ZSE/ISE30A series)
・Simultaneous copying is possible for maximum 10 units.
・3-step setting
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
| Series | Type | Rated pressure range |
|---|---|---|
| ZSE10F | Compound pressure | －100.0 to 100 kPa |
| ZSE10 | Vacuum pressure | 0.0 to －101.0 kPa |
| ISE10 | Positive pressure | －0.100 to 1.000 MPa |
