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Micro Mist Separator 10-AMD

Clean Series/Low-Particle Generation » Compressed Air Cleaning Filter Series

    Clean Series

Safety Instructions　Features/Basic Specifications/Clean Series Precautions
Air Preparation Equipment/Precautions　Green Procurement (RoHS)
SeriesFiltration (μm)Rated flow L/min (ANR)Port size
10-AMD0.01 (Filtration efficiency 99.9%)200 to 120001/8 to 2

Rotary Actuated Air Gripper 2-Finger Type 11-/22-MHR2/MDHR2

Clean Series/Low-Particle Generation » Air Grippers

    Clean Series


    ・A vertically compact configuration has been achieved through the use of a rotary actuator as the drive force source.
    ・Supports class 10 clean room.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Air Grippers Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Air Grippers/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriaesCylinder bore size (mm)
11-/22-MHR2Nominal size 10, 15, 20, 30

Rotary table 11-/22-MSQ

Clean Series/Low-Particle Generation » Rotary Actuators
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Rotary Actuator Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Rotary actuators precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriesRack typeSize
Basic type MSQB 		Size
High precision type MSQA		Rotating angle
11-/22-MSQDouble1, 2, 3, 7, 10, 20, 30, 501, 2, 3, 7, 10, 20, 30, 500 to 190°

Air Cylinder 10-/11-/21-/22-CG1-Z

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CG1-ZDouble acting, Single rod20，25，32，40，50，63，80，100
Standard10-/11-CG1W-Z　21-/22-CG1WDouble acting, Double rod20，25，32，40，50，63，80，100
Direct mount10-/11-CG1R-Z　21-/22-CG1RDouble acting, Single rod20，25，32，40，50，63

4/5 Port Solenoid Valve 10-SYJ

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SYJ30000.46dm3(s・bar)φ250.35
10-SYJ50000.83dm3(s・bar)φ400.35
10-SYJ70002.9dm3(s・bar)φ500.35

Reinforced Corrugated Cardboard Specification/Longer Length Reel: FEP Tubing (Fluoropolymer) TH0604-X64

Pneumatic Instrumentation Equipment » Piping Materials
    ・Length per roll: 500/250 m
    ・Operating temperature: 200℃
    ・Compatible with the Food Sanitation Law.
Green Procurement (RoHS)
SeriesTube size Tubing
O.D. ×Tubing I.D.		Fluid
T0604-X64φ6×φ4Air, Water, Inert gas

NAMUR Interface 3/5-Port Solenoid Valve IP67 Compliant, Hygienic Design Type VFN2120N-X23/-X36

Pneumatic Instrumentation Equipment » Solenoid Valves
    ・A hygienic design has been adopted.
    　Resin body with less concaves
    　Direct cleaning of the valve is possible. (IP67)
    ・3-port/5-port valves are available.
    　Due to the function plate, 3/5-port valves are selectable.
    ・Low power consumption
    　Power consumption: 0.5 W
    ・Port threads: NPT1/4, G1/4
Safety Instructions　Automation Example　Specific Product Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
(Cv/Effective area)		Manual overrideType of coil insulationPower consumption (W)
VFN2120N-X23/-X360.8/11mm2Push type
Locking type (Tool required)
Locking type (Manual type)		Class B0.5

Aluminum High Vacuum Angle Valve XL□

High Vacuum Equipment » High Vacuum Valves
Features
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLAAir
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		16 to 160
XLAV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust-free
Cleaned		16 to 160
XLCAir
operated		Double
acting		Bellows sealDust-free
Cleaned		16 to 160
XLCV
(With solenoid valve)		Air
operated		Double
acting		Bellows sealDust-free
Cleaned		16 to 80
XLFAir
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLFV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLGAir
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		16 to 160
XLGV
(With solenoid valve)		Air
operated		Double
acting		O-ring sealHigh-speed operation
High operating cycles		16 to 80
XLDAir
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLDV
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows/O-ring
seal		For preventing dust turbulence
For preventing a pump from
running overloaded		25 to 160
XLHManualManualBellows sealDust-free
Cleaned		16 to 50
XLSElectromagneticSingle
acting
(N.C.)		(Bellows balance)For portable equipment not
requiring air		16, 25

Diaphragm Valve for Ultra High Purity AP

Process Gas Equipment » Process Gas Equipment
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

Thermo-chiller/Environmentally Resistant Type HRS-R

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・Resistant to dust and water splashing
    ・Protection of the electrical unit: IP54
    ・Metal panel
    　The entire exterior surface is metal.
    　A stainless steel panel can be selected. (Option)
    ・A large capacity tank (12 L) is available. (Option)
    ・Ambient temperature: 5 to 45°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    Manual
    Series View search result
    HRS-RView search result
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    DoC
    Series View search result
    HRS-RView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS-R5 to 40℃1.9 kW
2.9 kW
5 kW
(60 Hz)		±0.1℃Air-cooled refrigerationTap water
Ethylene glycol aqueous solution (15%)

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