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Slit Valve XGT

High Vacuum Equipment » Slit Valves
    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6		Inert gas type vacuum32 x 222
46 x 236
50 x 336		0.45 to 0.6

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

High Vacuum Equipment » High Vacuum Valves
Features
    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
    　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
    　Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-100/160-X152Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		100，160
XLC-100/160-1-X152Air
operated		Double
acting		Bellows sealDust free,
Cleaned		100，160

Peltier-Type Thermo-con HEC

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
    ・For applications requiring high-precision temperature control
    ・High-precision, refrigerant-free temperature control equipment that uses a Peltier
    　device
    ・Simple structure and high reliability
    ・Can easily be built into equipment due to its compact and low-vibration design
    ・Compatible with a wide range of power supply voltages
    ・Compliant with UL Standards, CE-marking
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HEC10 to 60℃230 W, 600 W±0.01 to 0.03℃Peltier-type air-cooledTap water
HEC10 to 60℃140 W, 320 W±0.01 to 0.03℃Peltier-type water-cooledTap water, Ethylene glycol aqueous solution (20%)
HEC10 to 60℃600 W, 1200 W±0.01 to 0.03℃Peltier-type water-cooledTap water, Fluorinated fluid

Water-cooled Thermo-chiller/High-performance Type HRW

Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Thermo-chiller Compact Dual/Basic Type for Lasers HRLE

Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
Features
    ・The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
    ・Space saving, Reduced wiring
    　Footprint reduced by 21%
    　One power supply system for 2 channels
    ・Energy saving
    　Power consumption reduced by 17%
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling capacity
(CH1, 2 total)		Temperature
stability		Cooling methodCirculating fluid
HRLE050-ACH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		4.8kW/5.8k
(50Hz/60Hz)		CH1:±0.1
CH2:±0.5		Air-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE050-WCH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		4.8kW/5.8k
(50Hz/60Hz)		CH1:±0.1
CH2:±0.5		Water-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE090-ACH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		8.0 kW/9.5 kW
(50 Hz/60 Hz)		CH1: ±0.1
CH2: ±0.5		Air-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE090-WCH1: 9 kw,19 kW, 26 kW
CH2: 1.0 kW
(Max. 1.5 kW)		9.5 kW/11.0 kW
(50 Hz/60 Hz)		CH1: ±0.1
CH2: ±0.5		Water-cooled
refrigeration		Tap water,
Deionized (pure) water

Thermo-chiller/Inverter Type HRSH

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
Features
    ・Complete with energy-saving triple inverter!
    ・Outdoor installation, Splashproof type (IPX4)
    ・Max. ambient temperature: 45℃
    ・Min. ambient temperature: –20℃ (For the air-cooled type)
    ・Temperature stability: ±0.1℃ (When a load is stable)
    ・Space saving and lightweight: 280 kg (25 kW type)
    ・Compliant with UL Standards, CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Inverter Type HRSH
    Manual
    Series View search result
    HRSHView search result
  • Thermo-chiller/Inverter Type HRSH
    DoC
    Series View search result
    HRSHView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRSH5 to 35℃10 kW
15 kW
20 kW
25 kW
28 kW		±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Non-Metallic Pump/Double Acting Pump PAF

Process Pumps(Diaphragm Pumps) » Process Pumps
Fluoropolymer Equipment/PVC Equipment » Fluoropolymer Process Pumps
    ＊Tightening bolt, Air switching valve: Stainless steel
    　Use the PAF series standard products when a metal-free pump is necessary for hydrofluoric acid, etc.
Safety Instructions　Features/Series Variations　Made to Order Specifications/Maintenance Parts List
Related Products　Applicable Fluids　Product Specific Precautions
Green Procurement (RoHS)
SeriesActuationDischarge rate
(L/min)		Wetted parts material
PAF3410Automatically operated type1 to 20New PFA
(Fluororesin)
PAF3413Air operated type1 to 15New PFA
(Fluororesin)
PAF3410-X68Automatically operated type1 to 20New PFA
(Fluororesin)
PAF5410Automatically operated type5 to 45New PFA
(Fluororesin)
PAF5413Air operated type5 to 38New PFA
(Fluororesin)

Process Pump PA5000

Process Pumps(Diaphragm Pumps) » Process Pumps
Features
    ・Now with compact / energy saving / high-dispense-volume body material polypropylene (PP)!
    ・Compact: Height 185 mm x Width 134 mm x Depth 202 mm
    ・Lightweight: 3.0 kg (Polypropylene)
    ・Fluid contact body material:
    　Selectable from PP (polypropylene), aluminum or stainless steel
    ・Automatically operated type and air operated type are available.
    ・Self-priming makes priming unnecessary
Safety Instructions　Features/Series Variations　Related Products　Product Specific Precautions
Green Procurement (RoHS)
SeriesActuationDischarge rate
(L/min)		Wetted parts material
PA50□□Automatically operated
Air operated		63Polypropylene (PP)
PA51□□Automatically operated
Air operated		60Aluminum (ADC12)
PA52□□Automatically operated
Air operated		60Stainless steel (SCS14)

PVC Quick Drain Valve LVW

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Fluoropolymer Equipment/PVC Equipment » PVC Valves
    ・Compliant with JIS Standards for polyvinyl chloride piping (JIS K 6742)
    ・Applicable fluids: Deionized water, Chemical liquids
    ・Materials of wetted parts: PVC (Body)
    　　　　　　　　　　 PTFE (Poppet)
    　　　　　　　　　　 FKM (O-ring: Standard)
    　　　　　　　　　　 EPDM (O-ring: Option)
    ・Flow rate characteristics: Cv factor 10 to 198
    ・Easy piping with union connection
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Series Variations　Green Procurement (RoHS)
SeriesApplicable tubing O.D.Orifice diameterValve type
LVW60φ32 (Nominal dia. 25A)φ25Double acting
LVW80φ38 (Nominal dia. 32A)φ40Double acting
LVW80φ48 (Nominal dia. 40A)φ40Double acting
LVW90φ60 (Nominal dia. 50A)φ65Double acting
LVW90φ75 (Nominal dia. 65A)φ65Double acting
LVW90φ89 (Nominal dia. 80A)φ80Double acting

High Purity Chemical Liquid Valve/Air Operated, Threaded Type LVA

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Fluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
    ・Body materials: New PFA/Stainless steel/PPS
    ・Diaphragm materials: PTFE, EPR, or NBR can be selected.
    ・Organic solvents compatible
    　Body: Stainless steel, Actuator section: ADC, Buffer: Choose from FKM/EPDM
    ・Manifold type no.: LLA2，LLA3，LLA4，LLA5
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Series Variations　Green Procurement (RoHS)
SeriesTypeValve typePort size
Applicable tubing O.D.		Orifice diameter
(mmø)
LVAAir operated
Threaded type		N.C./N.O./
Double acting		1/8 to 12 to 22
LVAAir operated
Organic solvents
compatible		N.C./N.O./
Double acting		Metric: 6 to 19
Inch: 1/4 to 1		4 to 22

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