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Sine Cylinder 10-/11-REC
Clean Series/Low-Particle Generation » Air Cylinders
Clean Series
・Allows high-speed transfer of a workpiece which hates shock/impact.
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Type | Action | Bore size (mm) |
---|---|---|
10-/11-REC | Double acting | 20, 25, 32, 40 |
Clean Speed Controller with One-touch Fitting AS-FPQ/FPG
Flow Control Equipment » Speed Controllers Special EnvironmentsClean Series/Low-Particle Generation » Flow Control Equipment

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・Low particle generation type speed controller suitable for use in clean rooms
AS-FPQ: Electroless nickel-plated brass
AS-FPG: Stainless steel 304
・AS-FPQ, AS-FPG: Polypropylene resin (Resin parts)
Series | Port size | Applicable tubing O.D. |
---|---|---|
(21-)AS-FPQ | M5 x 0.8,R1/8,1/4,3/8,1/2 | φ4 to φ12 |
AS-FPG | M5 x 0.8,R1/8,1/4,3/8,1/2 | φ4 to φ12 |
Large Flow In-line Type AS
Flow Control Equipment » Speed Controllers for General PurposesType | Series | Port size on the cylinder side |
---|---|---|
Large flow in-line type | AS420 to 900 | 1/4 to 2 |
Power Clamp Cylinder CKZT
Air Cylinders » Clamp Cylinders
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・3 types of arm variations for each size
・Spatter resistant and water resistant structure
* Power clamp cylinders (ø40, ø80) are now available with a manual handle lock.
For details, refer to the “CKZT40” and “CKZT80” series.
Series | Arm opening angle | Switch | Bore size (mm) |
---|---|---|---|
CKZT | 30º, 45º, 60º, 75º, 90º 105º, 120º, 135º | TURCK/P&F | 40, 50, 63, 80 |
Compact Cylinder with Air Cushion RQ/RDQ
Air Cylinders » Compact Air Cylinders
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・The air cushion mechanism has been added to the CQS and
CQ2 series compact cylinders, extending the
body length only + 2.5 mm to 13 mm.
・Absorbs nearly triple the amount of absorbable allowable kinetic energy (Compared to the rubber bumper of the CQS and CQ2 series)
・Newly added compact type foot brackets
・With auto switch (RDQ series: RDQ)
Safety Instructions Actuators/Precautions
Auto Switches/Precautions Model Selection/Technical Data
Simple Specials Made to Order Common Specifications Green Procurement (RoHS)
Auto Switches/Precautions Model Selection/Technical Data
Simple Specials Made to Order Common Specifications Green Procurement (RoHS)
Type | Series | Action | Bore size (mm) |
---|---|---|---|
Standard | RQ | Double acting, Single rod | 20,25,32,40,50,63,80,100 |
5-Port Solenoid Valve VQC1000/2000
Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves-
・Enclosure IP67 compliant
・Flexible adaptation, such as the adding of stations and changing of specifications, is made possible with the use of a multi-pin connector manifold.
・Space-saving design with one side solenoid and fittings all positioned on one side, allowing free mounting
・No screws and one clamp structure for reduced recombination labor
・A variety of common wiring methods are available.
・4-position, dual 3-port valve
・Manifold type no.: VV5QC11, VV5QC21
*The EX250/500 series is to be discontinued. When designing new
equipment and facilities, consider using another series (EX260/EX600)
instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Selection/Technical Data
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Flow rate characteristics 4/2→5/3(A/B→R1/R2) C[dm3/(s・bar)] | Flow rate characteristics 4/2→5/3(A/B→R1/R2) b | Flow rate characteristics 4/2→5/3(A/B→R1/R2) Cv | Applicable cylinder size | Power consumption (W) |
---|---|---|---|---|---|
VQC1000 | 1.0 | 0.30 | 0.25 | φ40 | 0.4(Standard) |
VQC2000 | 3.2 | 0.30 | 0.80 | φ63 | 0.4(Standard) |
Vacuum Regulator 10-IRV
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
・Allows adjustment of vacuum line pressure.
・Single sided connections series
・Weight reduced by 20% (Compared with the existing IRV2000 with IRV20 fitting)
・Built-in One-touch fittings
・Easy to attach/detach the pressure gauge or digital pressure switch due to attachment by clip.
・Mounting direction of the pressure gauge or digital pressure switch can be changed. (Standard connections only)
・Mounting angle of the pressure gauge or digital pressure switch can be changed easily (in 60 degree increments).
Safety Instructions Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions Green Procurement (RoHS)
F.R.L. Units/Precautions Green Procurement (RoHS)
Series | Port size | Set pressure (kPa) |
---|---|---|
10-IRV | φ6, φ8, φ1/4, φ5/16 | -100 to -1.3 |
10-IRV20 | φ6, φ8, φ10, φ1/4, φ5/16, φ3/8 | -100 to -1.3 |
Low Speed Cylinder 10-/11-CM2X-Z/CQSX/CQ2X/CUX
Clean Series/Low-Particle Generation » Air Cylinders
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Type | Series | Action | Bore size (mm) | Min piston speed (mm/s) |
---|---|---|---|---|
Air cylinder | 10-CM2X-Z | Double acting | 20, 25, 32, 40 | 1 |
Air cylinder | 11-CM2X-Z | Double acting | 20, 25, 32, 40 | 0.5 |
Compact cylinder | 10-CQSX | Double acting | 20, 25, 32, 40 | 1 |
Compact cylinder | 11-CQSX | Double acting | 12, 16 | 1 |
Compact cylinder | 11-CQSX | Double acting | 20, 25 | 0.5 |
Compact cylinder | 10-CQ2X | Double acting | 32, 40, 50, 63 | 1 |
Compact cylinder | 11-CQ2X | Double acting | 32, 40, 50, 63 | 0.5 |
In-line Push Locking Type AS
Flow Control Equipment » Speed Controllers for General Purposes
Type | Series | Port size on the cylinder side |
---|---|---|
In-line push locking type | AS3500 | 1/4,3/8 |
High Pressure: Made to Order AR20 to 60-B-X425
Modular F.R.L./Pressure Control Equipment » Modular F.R.L.Modular F.R.L. Units » Regulators

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Stronger materials are used for the manufacturing of regulators intended for high-pressure operation.
The modified construction also allows for a wider set pressure range.
Refer to the AR series made to order specifications in the AC series catalog for details.
▶Click here for details
Series | Proof pressure [MPa] | Max. operationg pressure [MPa] | Set pressure range [MPa] | Ambient and fluid temperatures [℃] |
---|---|---|---|---|
AR20 to 60-B-X425 | 3.0 | 2.0 | 0.1 to 1.7 | -5 to 60 (No freezing) |