製程氣體用元件
逆止閥／真空產生器／流量開關 AP
| 系列 | 型式 | 本體材質 | 配管連接 | 配管尺寸 |
|---|---|---|---|---|
| AP | 逆止閥 | SUS316L 二次熔煉 | 面密封接頭 焊接管 | 1/4'', 3/8'' |
| AP | 真空產生器 | SUS316L | 面密封接頭l 焊接管 | 1/4'', 3/8'' |
| AP | 流量開關 | SUS316L 二次熔煉 SUS316L | 面密封接頭 焊接管 | 1/2'', 3/4'' |
產品特點
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
