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Process Gas Equipment

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
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SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld
1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld
1/4'', 3/8''
1/2''

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