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Diaphragm Valve for Ultra High Purity AP

Process Gas Equipment » Process Gas Equipment
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

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