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High Vacuum
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Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
High Vacuum Equipment » High Vacuum Valves
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・One-touch connection and release (No tools are required.)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XLAQ | Air operated | Bellows seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 16 to 50 |
| XLDQ | Air operated | Bellows seal O-ring seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 40, 50 |
