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Precision Regulator 10-IR

Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment

    Clean Series


    ・Tension control
    ・Contact pressure control
    ・Setting sensitivity: 0.2% F.S. or less
    ・Repeatability: ±0.5% F.S. or less
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions　Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
10-IR10001/80.005 to 0.2
0.005 to 0.4
0.005 to 0.8
10-IR20001/40.005 to 0.2
0.005 to 0.4
0.005 to 0.8
10-IR30001/4, 3/8, 1/20.01 to 0.2
0.01 to 0.4
0.01 to 0.8

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